We study surfaces and interfaces at the atomic level to create surfaces and interfaces with various functions. We have developed novel methods for surface structure analysis, such as Correlated Thermal Diffuse Scattering and Weissenberg Reflection High-energy Electron Diffraction (W-RHEED). W-RHEED is an excellent method that can measure a large amount of data required for three-dimensional surface structure analysis in only about 20 minutes. Using the developed methods and microscopy techniques such as Photoelectron Emission Microscopy (PEEM), Scanning Electron Microscopy (SEM), and Scanning Tunneling Microscopy (STM), we will reveal the structures of newly created surface and new materials, and elucidate their electronic structures by means of synchrotron radiation photoelectron spectroscopy at NanoTerasu.